A review of high-performance MEMS sensors for resource exploration and geophysical applications  

作　　者：Hua-Feng Liu Zhi-Cai Luo Zhong-Kun Hu Shan-Qing Yang Liang-Cheng Tu Ze-Bing Zhou Michael Kraft 

机构地区：[1]National Precise Gravity Measurement Facility(PGMF)and School of Physics,Huazhong University of Science and Technology,Wuhan,Hubei,430074,China [2]Institute of Geophysics,Huazhong University of Science and Technology,Wuhan,Hubei,430074,China [3]TianQin Research Center for Gravitational Physics and School of Physics and Astronomy,Sun Yat-sen University(Zhuhai Campus),Zhuhai,Guangdong,519082,China [4]Nanchang Research Institute,Sun Yat-sen University,Nanchang,Jiangxi,330099,China [5]ESAT-MNS,University of Leuven,Leuven,Belgium

出　　处：《Petroleum Science》2022年第6期2631-2648,共18页石油科学（英文版）

基　　金：funded by the National Key Research and Development Program(Grant No.2021YFB3201603);the National Natural Science Foundation of China(Grant No.42274228)

摘　　要：MEMS sensors have the advantages of small volume,lightweight,and low cost,therefore,have been widely used in the fields of consumer electronics,industry,health,defence,and aerospace.With their ever-improving performance,MEMS sensors have also started to be used in resource exploration and geophysical applications.However,the requirements of high-precision MEMS sensors for geophysical applications have not been specified in detail.Therefore,this paper systematically analyzes the requirements of high-performance MEMS sensors for prospecting and geophysical applications,including seismic surveillance,Earth tide,volcanic activity monitoring for natural disasters;seismic,gravity,and magnetic resource prospecting;drilling process monitoring and local gravity measurement for gravity aided navigation.Focusing on the above applications,this paper summarizes the state-of-the-art of research on high-performance MEMS sensors for resource exploration and geophysical applications.Several off-the-shelf MEMS sensors have been used for earthquake monitoring,seismic exploration and drilling process monitoring,and a range of MEMS research prototype sensors have successfully been employed for Earth tides measurement and are promising to be used for gravity exploration.MEMS magnetometers should have a lower noise floor to meet the demand for magnetic exploration.MEMS gravity gradiometers are still under early development and will not be deployable in short-term.Highperformance MEMS sensors hold the advantages of low-cost,high integration,and capability of working in extreme environments;therefore,they are likely to gradually replace some conventional geophysical instruments in some application areas.

关 键 词：ACCELEROMETER SEISMOMETER GRAVIMETER Tilt-meter MAGNETOMETER 

分 类 号：P631[天文地球—地质矿产勘探] P3[天文地球—地质学] TP212[自动化与计算机技术—检测技术与自动化装置]