633 nm热稳频He-Ne激光真空波长校准研究  

Study on vacuum wavelength calibration of 633 nm thermal frequency-stabilized He-Ne laser

作　　者：冉莉萍 殷聪[2] 王建波[2] 邹金澎 李兴兴 刘静 孙梦至 赫玉会 黎黎 RAN Liping;YIN Cong;WANG Jianbo;ZOU Jinpeng;LI Xingxing;LIU Jing;SUN Mengzhi;HE Yuhui;LI Li(Division of Mechanical Research,National Institute of Measurement and Testing Technology,Chengdu 610021,China;Division of Dimensional Metrology,National Institute of Metrology,Beijing 100029,China)

机构地区：[1]中国测试技术研究院机械研究所,四川成都610021 [2]中国计量科学研究院几何量计量科学研究所,北京100029

出　　处：《中国测试》2024年第S01期44-49,共6页China Measurement & Test

基　　金：国家重点研发计划青年科学家项目(2021YFF0603300);中国计量科学研究院基本科研业务费重点领域项目(AKYZD2105);上海市在线检测与控制技术重点实验室开放基金项目(ZX2023104)

摘　　要：633 nm热稳频He-Ne激光是激光干涉测量技术中应用最广泛的波长标准光源。633 nm激光波长是几何量计量中最重要的溯源路径。该文分析了633 nm热稳频He-Ne激光的频率特性,并以此为依据详细探讨了633 nm热稳频He-Ne激光器真空波长的校准内容和校准方法。在激光平均波长测量和波长不确定度评定中均考虑了波长复现性产生的影响,给出了校准数据处理方法和不确定度评定示例。结果显示,在633 nm热稳频He-Ne激光真空波长校准中,考虑复现性的影响是必要的。The 633 nm thermal frequency-stabilized He-Ne laser is the most widely used wavelength standard in laser interferometry.The 633 nm laser wavelength is the most important traceability path in geometrical quantities measurements.Frequency character of 633 nm thermal frequency-stabilized He-Ne laser is analyzed.Base on it,the calibration content and method of vacuum wavelength for 633 nm thermal stabilized He-Ne laser are discussed.The influence from reproducibility of wavelength is considered in average wavelength measurements and uncertainty.Examples of methods for data processing and uncertainty evaluation are illustrated.The resultsindicate that considering the influence of reproducibility is essential in the vacuum wavelength calibration of 633 nm thermal frequency-stabilized He-Ne laser.

关 键 词：稳频He-Ne激光 波长 校准 不确定度 复现性 

分 类 号：TN249[电子电信—物理电子学]