F-P标准具用于量块量值的传递与溯源  

F-P etalon is used for transmission and traceability of gauge block value

作　　者：张成悌[1] 薛靓[1] 付天坤 刘静 冉莉萍[1] 徐德宇 王冠熹 龚柯安 李华 张宝武[3] ZHANG Chengti;XUE Liang;FU Tiankun;LIU Jing;RAN Liping;XU Deyu;WANG Guanxi;GONG Kean;LI Hua;ZHANG Baowu(Nantioal Institute of Measurement and Testing Technology,Che ngdu 610021,China;Chengdu New Chenglinag Tools Co.,Ltd.,Chengdu 610503,China;China Jiliang University,Hangzhou 310018,China)

机构地区：[1]中国测试技术研究院,四川成都610021 [2]成都新成量工具有限公司,四川成都610503 [3]中国计量大学,浙江杭州310018

出　　处：《中国测试》2022年第S02期54-58,共5页China Measurement & Test

摘　　要：文章介绍具有F-P标准具的白光干涉仪检定量块的光学原理及其结构,以及检定F-P标准具的等倾干涉的原理。进一步对具有F-P标准具的白光干涉仪检定量块的测量不确定度进行分析,充分证明具有F-P标准具的白光干涉仪满足检定1等量块的要求。通过该文的介绍,印证该技术可以实现量块自动化检定,特别适用于量块生产厂00级、K级、0级量块的检定。文章还给出具有F-P标准具的白光干涉仪检定量块具有的9个优点。This paper introduces the optical principle and structure of the white light interferometer calibration gauge block,as well as the principle of the isoclinic interferometer used to calibrate the F-P etalon.The further analysis of the uncertainty of the white light interferometer calibration gauge block fully proves that the white light interferometer meets the requirements of calibrating the center length deviation of the first equal gauge block.Through the introduction of this article,it is proved that this technology can realize automatic verification,especially suitable for the verification of level 00,K and 0 gauge blocks in gauge block manufacturers.The paper also gives 9 advantages of F-P etalon and white light inter ferometer calibration gauge block.

关 键 词：白光干涉仪 F-P标准具 零次干涉带 等倾干涉环 

分 类 号：TH744.3[机械工程—光学工程]