微纳测量机靶镜正交偏差角测量不确定度评定  

Measurement uncertainty evaluation of the orthogonal deviationangles of the target mirror of micro/nano measuring machine

作　　者：黄强先[1,2] 张祖杨 郭小倩 陈志文 李红莉[1,2] 程荣俊 张连生[1,2] Huang Qiangxian;Zhang Zuyang;Guo Xiaoqian;Chen Zhiwen;Li Hongli;Cheng Rongjun;Zhang Liansheng(School of Instrument Science and Optoelectronics Engineering,Hefei University of Technology,Hefei 230009,China;Anhui Province Key Laboratory of Measuring Theory and Precision Instrument,Hefei University of Technology,Hefei 230009,China)

机构地区：[1]合肥工业大学仪器科学与光电工程学院,合肥230009 [2]合肥工业大学测量理论与精密仪器安徽省重点实验室,合肥230009

出　　处：《电子测量与仪器学报》2022年第10期1-8,共8页Journal of Electronic Measurement and Instrumentation

基　　金：国家重点研发计划项目(2019YFB2004901)资助

摘　　要：三维靶镜是微纳米坐标测量机系统中的重要组成部分,其各面间正交性对保障系统测量精度至关重要。为检验三维靶镜加工是否符合测量机精度要求,对三维靶镜正交偏差角进行测量及不确定度评定,在量值特性分析建模基础上,研究了测量不确定度表示指南传统方法(称为GUM法)、蒙特卡洛方法(MCM)及自适应蒙特卡洛方法(AMCM)3种测量评定方法。测量评定结果对比表明,三维靶镜加工精度基本符合预期要求,其中Z-X面和Y-Z面的面间夹角均为0.5″左右,X-Y面间夹角在3.3″左右;3种方法所得评定结果基本一致,MCM和AMCM较GUM法评定结果更合理,AMCM相对MCM更高效。所做工作为后续研究微纳米坐标测量机面向任务的测量不确定度评定提供了借鉴方法。The 3D target mirror is a vital part of micro/nano coordinate measuring machine system.The orthogonality between its any two mirror planes is very important to ensure the measurement accuracy of the measuring machine system.In order to verify whether the 3D target mirror meets the accuracy requirement of the measuring machine,the orthogonal deviation angles of the 3D target mirror are measured and the measurement uncertainties are evaluated.On the basis of quantitative characteristic analysis and modeling,the traditional method(called as GUM method)given in the guide to the expression of uncertainty in measurement,Monte Carlo method(MCM)and adaptive Monte Carlo method(AMCM)are researched.The comparison of the measurement evaluation results shows that the 3D target mirror approximately meets the accuracy requirement of the measuring machine.The orthogonal deviation angles of Z-X mirror planes and Y-Z mirror planes are about 0.5″,and the orthogonal deviation angle of X-Y mirror planes is about 3.3″.The evaluation results obtained by the three methods are basically consistent.Moreover,MCM and AMCM are more reasonable than GUM,and AMCM method is more efficient than MCM method.This work provides reference methods for the task-oriented measurement uncertainty evaluation of micro/nano CMM.

关 键 词：测量不确定度 坐标测量机 测量不确定度表示指南 蒙特卡洛方法 自适应蒙特卡洛方法 

分 类 号：TH721[机械工程—仪器科学与技术]