电子和半导体行业纯水制备设备分析  

Analysis of pure water preparation equipment in electronics and semiconductor industry

作　　者：王玉兵 WANG Yubing(China Electronics Innovation Environmental Technology Co.,Ltd.,Wuxi 214100,China)

机构地区：[1]江苏中电创新环境科技有限公司,江苏无锡214100

出　　处：《中国高新科技》2022年第24期125-126,129,共3页

摘　　要：电子和半导体行业对纯水水质要求较高,纯水制备过程中需逐级去除各种污染物,最终达到用水要求。文章针对典型种类的污染物,阐述了当前工程中已得到广泛应用的污染物去除设备及典型纯水制备工艺路线,以供相关人员参考。The electronic industry and semiconductor industry have a high requirement for the quality of pure water.To meet the requirement,various pollutants need to be removed step by step during the preparation of pure water.Aiming at typical kinds of pollutants,this paper summarizes the pollutant removal equipments and typical pure water preparation technologies that have been widely used in current projects.

关 键 词：电子 半导体 纯水 设备 

分 类 号：TQ460[化学工程—制药化工]