全固态光束控制器件结构设计与热分析研究  

Structure and Thermal Design of a Solid-State Optical Beam Control Device

作　　者：陶新[1] 邹尔博[1] 罗淼[1] TAO Xin;ZOU Er-bo;LUO Miao(Huazhong Institute of Electro-Optics-Wuhan National Laboratory for Optoelectronics,Wuhan 430223,China)

机构地区：[1]华中光电技术研究所—武汉光电国家研究中心,湖北武汉430223

出　　处：《光学与光电技术》2022年第3期31-39,共9页Optics & Optoelectronic Technology

摘　　要：相比传统机械扫描,光学相控阵技术在扫描精度、扫描速度、转动惯量等方面具有优势,是实现大视场范围内多目标定位和三维成像的重要技术途径。随着微纳光子集成的发展,硅基光波导光学相控阵器件得到了广泛研究,并被视为全景光电成像和激光成像雷达的核心器件。介绍了硅基光波导光学相控阵的基本原理和数学模型,并设计了一个16元相控阵器件,对其温度场分布和热特性进行了分析。在此基础上,对光栅耦合器、MMI分束器、波导光栅天线等关键元件进了有限元分析和仿真,完成优化设计。基于该设计完成了器件的流片制备,并搭建了性能测试验证平台。利用该平台对器件的扫描精度(1.2°)、扫描范围(大于±30°)和扫描速度(20 kHz)分别进行了测试,验证了设计方法的可行性。Compared with the traditional mechanical scanning mechanism,optical phase array has the advantages in scanning accuracy,speed and rotation inertia.Thus,it is considered as a potential solution for multiple targets positioning and three-dimensional imaging in wide view range.Since MEMS integrated photonics technology has been developed rapidly,silicon waveguide optical phase array attracts much attention for its application in panoramic imaging and lidar.A16-units phase array device is introduced and designed in this article after the basic principle and mathematical model is indicated.And the thermal analysis is also realized while the temperature distribution is simulated.Based on this design,the main components such as grating coupler,MMI beam splitter and grating antenna are simulated and optimized with FDTD.After that,the practical device is fabricated with EBL and the test platform is also built for verifying the device performance.According to the test results,the scanning accuracy(1.2°),range(larger than±30°)and speed(20 kHz)are derived,so that the full design process is verified.

关 键 词：光波导 相控阵 电场分布 温度场 光栅天线 分束器 

分 类 号：TN25[电子电信—物理电子学]