钛基纳米金刚石涂层场发射阴极的工艺改进  

Technics amelioration of Ti-based nano-diamond coating field emission cathode

作　　者：翟春雪[1] 张志勇[1] 王雪文[1] 秦坤 

机构地区：[1]西北大学信息科学与技术学院

出　　处：《华中科技大学学报（自然科学版）》2007年第S1期34-36,40,共4页Journal of Huazhong University of Science and Technology(Natural Science Edition)

基　　金：陕西省科技发展计划资助项目(2001K07-G4)

摘　　要：钛基纳米金刚石涂层场发射阴极适于大面积制备,但原始工艺制备出的样品场发射性能较低.为提高样品的性能,对原始工艺进行了改进:首先,改变分散液成分,在原分散液中加入表面活性剂以改善金刚石纳米粉的分散效果;其次,改变真空热处理(HFCVD)系统的热丝结构使样品热处理时的温度场更加均匀;最后,在原工艺基础上增加表面处理环节,用射频氢等离子体对金刚石纳米粉涂层进行表面处理以降低样品的场发射阈值.经过工艺改进,样品的阈值场强由6.3 V/μm降低至1.9 V/μm,在17.6 V/μm场强下的场发射电流密度由56.1μA/cm2提高到61μA/cm2.Ti-based nano-diamond coating field emission cathode is adapted to large area preparation,unfortunately the performance of as-prepared cathodes was very low.So the ameliorations based on the primary technics have been conducted.Firstly,surface active agent was added into the suspension of nano-diamond powders in order to improve the dispersing effect;secondly,hot filaments in the vacuum system(HFCVD) were rearranged to enhance the uniformity of temperature distribution during the thermal treatment process;l...

关 键 词：场发射阴极 纳米金刚石涂层 表面活性剂 热处理 氢等离子体处理 

分 类 号：TN105[电子电信—物理电子学]