半导体激光器腔面镀膜研究  

Study of Semiconductor Laser Facets Coating

作　　者：吴根柱[1] 齐鸣[1] 何友军[1] 张永刚[1] 李爱珍[1] 

机构地区：[1]中国科学院上海微系统与信息技术研究所信息功能材料重点实验室,上海200050

出　　处：《半导体光电》2003年第3期203-205,共3页Semiconductor Optoelectronics

摘　　要：从理论和实验两方面研究了半导体激光器腔面功率增强膜的镀制方法,得到一些新的镀膜设计方案,改善了传统半导体激光器腔面镀膜工艺。Coating methods of power-enhanced film of semiconductor laser facets have been studied by using theories and experiences, and a new design of coating has been found out. The traditional process of semiconductor laser facets coating is improved.

关 键 词：端面反射率 减反射膜 高反射膜 行波速率方程 

分 类 号：TN248.4[电子电信—物理电子学]