变温蠕变实验的COP微流控芯片热压制备  

Variable temperature quasi-creep experiment for fabrication of microfluidic chip using Cyclo-olefin Polymer(COP)

作　　者：罗怡[1] 王晓东[1] 杨帆[2] 刘冲[2] 

机构地区：[1]大连理工大学精密与特种加工教育部重点实验室,辽宁大连116023 [2]大连理工大学辽宁省微纳米技术及系统重点实验室,辽宁大连116023

出　　处：《光学精密工程》2007年第7期1090-1095,共6页Optics and Precision Engineering

基　　金：国家863MEMS重大专项课题资助项目(No.2004AA404260);国家自然科学基金资助项目(No.50575036);辽宁省博士启动基金资助项目(No.20041073)

摘　　要：采用热压方法制备了COP微流控芯片。由于温度对微结构热压成形的质量影响最大,基于材料的粘弹性特性,通过变温准蠕变实验获得热压参考温度Tr,即从材料玻璃点温度以下开始,以1.5℃/min的温升速率,在热压工作压力下热压聚合物基片,通过温度-位移实时采集系统获得材料的温度-形变曲线,曲线的拐点对应的温度即是热压参考温度。实验证明了在该温度下热压成形具有高复制精度和低整体变形,微结构宽度和深度方向的复制精度分别达到97.6%和94.3%。电泳实验和DNA分析实验得出COP芯片具有良好的生物兼容性,适用于生化分析。A hot embossing method is used to fabricate Cyclo-olefin Polymer (COP) microfluidic chip in this paper. Since temperature is the most important parameter in hot embossing process, the variable temperature quasi-creep experiment is set up to study the viscoelastic character of COP for determination of the working temperature. From a point of temperature below COP's (Tg) temperature, applying the embossing working pressure, the temperature-deformation curve at slow temperature rising speed (1.5°C/min) is obtained. According to this curve, the hot embossing of microstructure under embossing reference temperature (Tr) has a high accuracy and low substrate deformation. Experiments show that average duplication precision is 97.6% in width and 94.3% in depth. Electrophoresis and DNA separation experiments have been done on fabricated COP chip, which shows that COP chip has excellent biologic compatibility and is suitable for biochemical analysis.

关 键 词：COP微流控芯片 变温准蠕变实验 电泳效率 

分 类 号：TH706[机械工程—仪器科学与技术] TN405[机械工程—精密仪器及机械]