热处理对TiO_2-V_2O_5纳米复合薄膜结构及性能的影响  

Study of heat treating on structure and properties of nanocomposite TiO_2-V_2O_5 thin films

作　　者：李德增[1] 吴广明[1] 王爱荣[1] 肖锟[1] 沈军[1] 周斌[1] 张志华[1] 

机构地区：[1]同济大学波耳固体物理研究所,上海200092

出　　处：《材料热处理学报》2007年第3期14-18,共5页Transactions of Materials and Heat Treatment

基　　金：上海市纳米科技与产业发展中心(0352nm043);国家自然科学基金(20133040和50572073)

摘　　要：以钛酸丁脂、V2O5粉末为前驱体,采用溶胶-凝胶技术制备了TiO2-V2O5纳米复合薄膜,并通过椭偏仪、AFM、XRD、TG-DSC和UV-VIS-NIR分光光度计等方法研究热处理对复合薄膜特性的影响。结果表明:随热处理温度的升高,TiO2的结构由非晶到锐钛矿再到金红石相转变,并且金红石相出现和完全转变的温度降低约200℃;晶粒尺寸从5.1nm逐渐增大227.3nm;复合薄膜的折射率由1.6增大到2.4,同时薄膜厚度从276nm降低到187nm;薄膜在紫外光区的透射率减小,吸收边缘出现红移。TiO2-V2O5 nano-composite thin films were prepared by sol-gel process with Ti (C4H9O)4 and V2O5 powder as the starting materials. The thin films were characterized by Ellipsometer, AFM, XRD, TG-DSC and UV-VIS-NIR spectrophotometer. The results show that with increase of heating temperature, TiO2 transforms from amorphous to anatase and then to rutile. The temperature at which rutile appeared and anatase turning into rutile completely decreases about 200°C. Crystallite size grows from 5.1nm to 227.3nm gradually. The refractive index of TiO2-V2O5 composite thin films changes from 1.6 to 2.4, and the thickness reduces from 276nm to 187nm simultaneously. The transmittance of the films in the ultraviolet range falls remarkably while the absorption edges take a red shift with the increase of annealing temperature.

关 键 词：溶胶-凝胶法 TiO2-V2O5纳米复合薄膜 热处理 

分 类 号：O484.4[理学—固体物理] TG151.1[理学—物理]