Nb-In复合氧化物氯气传感器的研制  

Research on Nb-In Compound Oxide Chlorine Gas Sensor

作　　者：钟铁钢[1] 梁喜双[1] 刘凤敏[1] 何月华[1] 王彪[1] 全宝富[1] 

机构地区：[1]集成光电子国家重点实验室吉林大学实验区吉林大学电子科学与工程学院,长春130012

出　　处：《传感技术学报》2007年第10期2155-2158,共4页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金资助项目(60574096)

摘　　要：以In(NO3)3、Nb2O5、氨水为原料,采用化学沉淀法制备了不同Nb-In比的复合氧化物纳米材料.通过不同温度(500℃-800℃)烧结得到了不同的Nb-In复合氧化物材料.利用X射线衍射仪对材料的晶体结构进行了表征并估算粒径大小.利用这种材料制备管式厚膜气体传感器.研究表明,元件在温度为100℃时对50×10-6Cl2表现出较高的灵敏度(7900)和较好的选择性,元件对Cl2的检测下限为0.2×10-6,加热功率为130mW.最后,对其敏感机理进行了分析.Using In(NO3)3、Nb2O5、NH3·H2O as the starting materials,we prepared nano-sized different proportion Nb-In compound oxide powders by chemical deposition method.The nano-sized powders were obtained by means of sintering with different annealing temperature.These powders were studied by XRD.We received thick film sensor using this material.The research showed the element had highest sensitivity to Cl2 and behave good selectivity at the operating temperature(100℃).The lowest limit of gas concentration was 0.2×10-6.The heating power is 130 mW.Finally,the reaction mechanism was proposed.

关 键 词：IN2O3 NB2O5 CL2 气体传感器 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]