适用于极端环境的高精度压力传感器开发与标定  

Developing and Calibrating of the High Precision Pressure Sensor Applied in Extreme Environment

作　　者：蒋凯[1] 叶树明[1] 陈杭[1] 吕荣坤[2] 周怀阳[3] 

机构地区：[1]浙江大学生物医学工程与仪器科学学院,杭州310027 [2]浙江大学力学实验教学中心,杭州310027 [3]中科院广州地球化学研究所,广州510640

出　　处：《传感技术学报》2007年第10期2230-2233,共4页Chinese Journal of Sensors and Actuators

基　　金：国家海底区域研究开发"十五"攻关资助项目(DY105-03-01-16);国家自然科学基金仪器专项资助(40327001)

摘　　要：设计一种可应用于高温高压、强腐蚀性环境的压力检测传感器,以满足极端环境科学研究的需求.利用可耐高温高压、抗腐蚀、具有高屈服强度的钛金属作为传感器材料,采用组合式结构和特殊的圆膜片贴片与组桥技术,开发了适合于极端环境工作的钛压力传感器,并应用多维线性插值算法对传感器进行标定,以提高检测精度.实验检测结果表明,钛压力传感器在60MPa、400℃环境下的酸性或碱性溶液中都能正常工作,检测精度可以达到±0.2(FS以内,满足极端环境高精度压力检测需求.A kind of pressure sensor applied to high-temperature, high-pressure and corrosive environment was designed to meet the demand of research on extreme environment. Titanium is the appropriate material to develop such sensor for its high-temperature and high-pressure resistance, corrosion resistance, and high yield-strength. A new pressure sensor applied to extreme environment was developed. Combined structure and disk-shape diaphragm sticking techniques as well as novel bridging form of strain gauge were adopted in the design of the new titanium pressure sensor, and multiple linear interpolation algorithm was developed to improve the detection precision. The results of experiment illustrated that the titanium pressure sensor could work well in acidic or alkalic solution, even in 60 MPa, 400℃ environment, and the precision was improved to ±0.2%FS after calibration. The new sensor could meet the command of high precision pressure detecting in extreme environment.

关 键 词：压力传感器 极端环境 钛金属 标定 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]