Optimization of PZT-Based Radio-Frequency Filters  

作　　者：任天令 赵宏锦 丛鹏 刘燕翔 刘建设 刘理天 李志坚 

机构地区：[1]Institute of Microelectronics,Tsinghua University,Beijing 100084,China

出　　处：《Tsinghua Science and Technology》2003年第2期135-138,共4页清华大学学报（自然科学版（英文版）

基　　金：Supported by the National"973"Project(No.G1999033105);the National Natural Science Foundation of China(No.69806007)

摘　　要：Analytical solutions are presented for the wave equation for the electrode-piezoelectric-electrode sandwich structure in film bulk acoustic resonators (FBAR). The impedance for lead-zirconate-titanate (PZT)-based FBAR was derived using the proper boundary conditions and material parameters. A method is presented to adjust the resonant frequency based on the process and material properties. Ferroelectric-based radio-frequency filters were designed using FBARs. An accurate result is given for the filter impedance which can be used for other piezoelectric devices.Analytical solutions are presented for the wave equation for the electrode-piezoelectric-electrode sandwich structure in film bulk acoustic resonators (FBAR). The impedance for lead-zirconate-titanate (PZT)-based FBAR was derived using the proper boundary conditions and material parameters. A method is presented to adjust the resonant frequency based on the process and material properties. Ferroelectric-based radio-frequency filters were designed using FBARs. An accurate result is given for the filter impedance which can be used for other piezoelectric devices.

关 键 词：Acoustic surface wave filters Electric impedance MICROMACHINING Resonators 

分 类 号：TN713[电子电信—电路与系统]