远程控制在红外椭偏光谱实验上的应用  

APPLICATION OF REMOTE CONTROLSYSTEM TO INFRARED SPECTROSCOPIC ELLIPSOMETER

作　　者：刘 铸[1] 朱晓松[1] 倪卫明[1] 马允胜[1] 缪 键 陈良尧[1] 

机构地区：[1]复旦大学信息工程学院光科学与工程系,上海200433

出　　处：《红外与毫米波学报》2002年第z1期129-132,共4页Journal of Infrared and Millimeter Waves

基　　金：国家自然科学基金(批准号69878003);联合国教科文组织的资助项目

摘　　要：基于ＴＣＰ/ＩＰ数据传输协议,实现对红外双傅立叶椭偏仪的远程控制．实验系统主要分为远地用户系统与本地实验服务器系统,远地实验用户经过身份认证后,取得与实验服务器的通信联系．在本地实验者的协助下按装样品并调节好光路,然后远程通过网络设置实验测量的入射角度和光谱测量的能量范围,实验测量结束后可立即获得实验结果远程实验系统还包含视频监视系统,可以在实验中对整个系统进行监视．A new remote control system of infrared spectrosoopic ellipsometer was constructed. TCP/IP was used in data and command dialogue transmission .The system includes the remote client and local server to realize the one-to-one connection and experiment controlling. After a remote user s identity is recognized, the local experiment expert will provide the help to mount the sample and make the optical alignment of the system. Afterwards, the remote user can set (he measurement parameters, such as the incidence angle and the spectral energy range through the net, and then run the experiment remotely. When the experiment is over, the remote user can obtain the result immediately. Also, the visual system is set up to remotely monitor the experiment.

关 键 词：字 椭偏仪 红外 远程控制. 

分 类 号：TN2[电子电信—物理电子学]