静电陀螺维持真空的复合泵技术  

Composite pump for maintaining ESG's vacuum

作　　者：昝春燕[1] 冯玉才[2] 昝德海 屠启基[1] 张军安 

机构地区：[1]天津航海仪器研究所,天津300131 [2]总装备部驻天津地区军事代表室,天津300131 [3]秦皇岛山船重工机械有限公司,秦皇岛066003

出　　处：《中国惯性技术学报》2006年第5期55-57,共3页Journal of Chinese Inertial Technology

摘　　要：静电陀螺仪的真空保持是影响其精度、可靠性和使用寿命的关键技术之一。结合消气剂和离子泵的各自优缺点,研制了一种由非蒸散型消气剂泵与冷阴极溅射离子泵组成的复合泵。采用(?)9mm×7mm的消气剂器件,消气剂泵最大吸气量≥6．3×10-3Pa·m3,确保离子泵在1×10-2Pa真空条件下启动,抽至ESG工作压力P=仅2分钟,而复合泵的寿命提高到100 000 h,为以前的5倍。The vacuum maintenance is a key technique of Electro-static gyroscope(ESG) which can influence the ESG's precision, reliability and life. A composite pump was developed which is composed of a nonevaporable getter pump and a sputtering ion pump. It combines the advantages of both pumps, and uses the getter material of (?)9 mm×7 mm. The getter pump's maximum pumping capacity is≥6.3×10-3 Pa ?m3.This ensure the ion pump start-up under the vacuum condition of 1×10-2 Pa, and ESG obtain the working pressure of 1.3×10-6 Pa within 2 min. The composite pump's life can reach 100 000 h which is 4 times higher than before.

关 键 词：静电陀螺仪 真空保持 消气剂泵 离子泵 

分 类 号：U666.1[交通运输工程—船舶及航道工程]