纳米压痕和划痕法对含氧化铈薄膜机械性能的测定  

Mechanical Properties of Composite Coating Consisting of Cerium and Titanium by Nanoindentation and Nanoscratch

作　　者：赵洪力[1] 蔡永秀 韩冰[1] 张福成[1] 

机构地区：[1]燕山大学材料科学与工程学院

出　　处：《中国稀土学报》2006年第z1期116-119,共4页Journal of the Chinese Society of Rare Earths

基　　金：河北省自然科学基金(E2004000241)项目资助

摘　　要：采用溶胶-凝胶法在玻璃基体上制备了CeO2-TiO2单层膜、TiO2-SiO2单层膜和CeO2-TiO2/TiO2-SiO2双层膜,采用纳米压痕和划痕法对薄膜的机械性能(纳米硬度、弹性模量、临界载荷、摩擦系数)进行了分析。实验结果表明,双层膜与玻璃基体的附着力以及弹性模量、硬度等指标均大于单层膜,由TiO2-SiO2组成的内层,对强化附着力起到了关键作用。Single layered and double layered coating consisting of cerium and titanium was deposited on float glass via the sol-gel process.Mechanical properties,such as hardness,elastic modulus and critical loading point,were measurement by nanoindentation and nanoscratch.The results shows that the bilayer coatings combined the outer layer of CeO2+TiO2 with inter SiO2+TiO2 layer has the excellent mechanical properties.Inter layer plays important roles in improving the adhesion of the coating to the glass substrate.

关 键 词：双层薄膜 氧化铈 溶胶-凝胶法 纳米压痕 纳米划痕 稀土 

分 类 号：TB171.73[生物学—生物工程] TB43