基于迈克尔逊干涉仪的斜率与形状测量系统  

Measuring system for slope and shape based on Michelson interferometer

作　　者：张于北[1] 郭广平[1] 张建合[1] 刘庆珍[1] 

机构地区：[1]北京航空材料研究院6室,北京100095

出　　处：《仪器仪表学报》2006年第z2期1549-1550,共2页Chinese Journal of Scientific Instrument

摘　　要：运用迈克尔逊干涉仪的原理,可以十分容易地建立实时错位散斑斜率测量与条纹投射三维形状测量系统。通过一个压电陶瓷相移器,还能够在错位散斑斜率测量与条纹投射形状测量方法中实现自动相移技术下的相位测量。经过去除噪声、试验结果的计算机自动评价,测量数据的质量明显提高。使用这些技术,比较成功地完成了两项测试实验:铝合金蜂窝板结构的内部缺陷检测和牙齿咬合面的形状测量,并给出了相应的实验结果和结论。It is convenient to set up both real-time shearography and projected-grating measuring system for deformation and 3-D shape based on a Michelson interferometer. Using a PZT phase-shifter, automated phase shifting and measuring were completed in shearography and projected-grating technique. And by removing data noise and computer evaluating test results, the quality of test data got into a new level. Two tests were well done: NDT for detecting defects in a honeycomb bonded plate of aluminum alloy; shape measurement on the top area of a tooth. Testing results and conclusions were also presented.

关 键 词：错位散斑 条纹投射 斜率测量 形状测量 相移 

分 类 号：TH7-55[机械工程—仪器科学与技术]