基于水银的电容式加速度计研究  

Research on Capacitive Accelerometer Using Mercury

作　　者：马铁华[1] 朱红[1] 

机构地区：[1]中北大学,太原030051

出　　处：《仪器仪表学报》2005年第z1期382-383,共2页Chinese Journal of Scientific Instrument

基　　金：国家自然科学基金(60274029)资助项目

摘　　要：探索一种基于新原理的加速度计,从根本上解决加速度计在弹性结构设计方面高灵敏度和抗高过载之间存在的矛盾;利用微滴水银作为对加速度敏感的弹性电极与硅片上电极构成电容式硅微加速度计,并可利用MEMS工艺来实现;通过建模仿真,水银电容加速度计的灵敏度要高于传统的MEMS电容加速度计;这种加速度计具有结构简单、对硅微加工工艺要求低、易于实现三维加速度测量的突出优点;对于冲击环境下的惯性测量有不可替代的作用。It proposes a novel principle of accelerometers which can resolve the basic problems in the design of elastic component of accelerometers. The proposed accelerometer can transduce an acceleration input into a capacitive output by a minim mercury and can be fabricated by using MEMS technique. The simulation for this accelerometer shows that its sensitivity is higher than those of conventional capacitive MEMS accelerometers. This accelerometer can be easily manufactured to measure acceleration in three dimensions and will play important role in inertial measurement under impactive environment.

关 键 词：加速度计 水银 电容传感 

分 类 号：TH7-55[机械工程—仪器科学与技术]