双层膜湿敏元件特性研究  

Research on Properties of Bilayer Humidity Sensors

作　　者：宋刚[1] 王兢[1] 

机构地区：[1]大连理工大学电信学院,大连116023

出　　处：《仪器仪表学报》2005年第z1期193-194,202,共3页Chinese Journal of Scientific Instrument

基　　金：国家自然科学基金(60074031;60474052)资助项目

摘　　要：纳米钛酸钡(nano-BaTiO3)与高分子季胺盐型丙烯酸树脂(Poly QAR)是两种良好的湿敏材料.将两种材料制备成BaTiO3/Poly、Ploy/BaTiO3双层膜湿敏元件.双层膜元件的灵敏度较高,相对湿度从11%RH变化到98%RH的过程中,其电阻变化了4～5个数量级.与单层膜相比,双层膜的湿滞更小.无论是从数据点的测量误差范围方面,还是元件长期稳定性方面,双层膜BaTiO3/Poly、Ploy/BaTiO3都要优于单层膜Poly和BaTiO3元件.由于采用的是双层复合方式,因此双层膜的若干优点得益于上下层材料之间的复合界面.Both nanometer BaTiO_3 and polymer quaternary acrylic resin (QAR) possess good humidity sensing properties. Humidity sensors with two layers of BaTiO_3/polymer and polymer/BaTiO_3 were made, respectively. The resistance of the bilayer humidity sensors changes 4～5 orders during the relative humidity variation from 11%～98%. Some properties of the bilayer sensors, such as the humidity hysteresis and long-term stability, are better than the ones of both one-layer BaTiO_3 or QAR sensors. The interfaces of two kinds of the materials may be an important actor in the bilayer sensors.

关 键 词：湿度传感器 双层膜 纳米钛酸钡 高分子 

分 类 号：TH7-55[机械工程—仪器科学与技术]