电阻式与电容式纳米钛酸钡湿敏元件性能分析  

Properties of Resistive and Capacitive Type BaTiO_3 Humidity Sensors

作　　者：王晓华[1] 王兢[1] 石凯贺[1] 

机构地区：[1]大连理工大学电信学院,大连116023

出　　处：《仪器仪表学报》2004年第z1期50-51,共2页Chinese Journal of Scientific Instrument

基　　金：国家自然科学基金资助项目(60074031)

摘　　要：用纳米晶钛酸钡粉末制成电阻式和电容式两种结构的湿敏元件。测量了两种结构元件在不同湿度(11%～98%)、不同频率(10Hz～100kHz)时的电阻、电容、阻抗等电学参数,对元件的灵敏度、阻抗、湿滞、响应—恢复时间等感湿特性进行了测量和分析。结果表明两种结构的湿敏元件都具有较高的灵敏度,但最佳测试频率不同。A resistive type and a capacitive type humidity sensors were made of nanocrystalline BaTiO_3.The resistance,capacitance and impedance were investigated when relative humidity(RH) varied from 11% to 98% and frequence shifted from 10Hz to 100kHz.The sensitivity,humidity hysteresis,response-recover properties and impedance properties of the two type humidity sensors were tested.The sensitivities of both kinds of sensors are high.The best measurement frequencies are different for two kinds of humidity sensors.

关 键 词：湿敏元件 电阻式 电容式 纳米钛酸钡 

分 类 号：TH7-55[机械工程—仪器科学与技术]