利用碳纳米管探针进行纳米加工的研究进展  

Progress of Study on Nano Fabrication Using Carbon Nano Tube Tip

作　　者：胡小鹏 刘庆纲[1] 匡登峰[1] 李源[1] 胡小唐 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《仪器仪表学报》2003年第z1期559-562,共4页Chinese Journal of Scientific Instrument

基　　金：教育部天津大学南开大学科技合作项目;天津市自然科学基金项目 ( 0 13 60 2 111)资助

摘　　要：碳纳米管具有小的半径、高的长径比、高的弹性模量和弯曲强度和导电特性 ,这使得它很适合做原子力显微镜探针进行高分辨率测试和纳米级加工 ,并使加工的纳米点、线和复杂图形在加工过程中保持比较一致的形状和高的纵横比。文中提出了一套制备碳纳米管探针的热丝化学气相沉积 (HF- CVD)装置 ,叙述了 HF- CVD的原理。Carbon nano Tube takes the advantages of small radius,high aspect ratio,flexibility,inflect intensity and conductivity.All these made it suitable for acting as the tip of atomic force microscope in high resolution measurement and nanometer scale fabrication.This kind of tip can form nano dot,line and figures with high aspect ratio and consistency.In this paper,the hot filament chemical vapour deposition (HF CVD) method to form CNT tip is introduced.The design of the HF CVD equipment and the application of CNT tip in atomic force microscope are described.

关 键 词：纳米加工 碳纳米管 HF-CVD 

分 类 号：TH74[机械工程—光学工程]