非"均衡布线"对VLSI可靠性的影响  

Conception of Equilibrium Routing in VLSI Design and Related Problems

作　　者：马群刚[1] 李跃进[1] 杨银堂[1] 

机构地区：[1]西安电子科技大学微电子研究所,陕西西安710071

出　　处：《微电子学》2002年第6期431-434,共4页Microelectronics

摘　　要：　在VLSI的制造过程中,常常由于设计中布线的不均衡,导致芯片性能不稳定或者失效。文章根据一些工艺生产线上的实践,提出了"均衡布线"的概念,并且在集成电路设计、工艺等方面,提出了在非"均衡布线"时影响电路可靠性的一些主要因素(负载效应、应力迁移、电迁移、串扰等)及相应的解决措施。In this paper, the conception of equilibrium routing is advanced for convenience in later researches Subsequently, several main factors resulting in the unstability, and even failure, of the device are discussed from the point of view of VLSI design and process technology Meanwhile, corresponding solutions to these problems are proposed

关 键 词：VLSI 可靠性 均衡布线 负载效应 应力迁移 电迁移 

分 类 号：TN47[电子电信—微电子学与固体电子学]