表面粗糙度的非接触在线测量研究  

The Research of a Noncontact In-process Sensor for surface Roughness

作　　者：安伟[1] 郑文学[1] 

机构地区：[1]长春光学精密机械学院光学工程系

出　　处：《长春光学精密机械学院学报》1993年第2期67-69,共3页Journal of Changchun Institute of Optics and Fine Mechanics

摘　　要：本文论述了一种高精度非接触表面粗糙度测量装置,此装置采用反射光位置判别法,用半导体激光器作光源,CCD器件作光电接收器件,具有精度高,测量速度快,体积小,重量轻的特点,可用于在线测量。In this paper, a high resolution nontact measure equipment is discussed. The principle of it is method of reflected light position detection. The light source of the apparatus is a diode laser and photo-electric chang diode is CCD device. It is high in resolution, small in volume, little in weigh and measure quickly. It can be used in-process.

关 键 词：粗糙度 表面粗糙度 非接触在线测量 

分 类 号：TG84[金属学及工艺—公差测量技术]