Ti-2Al-2.5Zr合金N^+离子注入表面XPS和XRD分析  

XPS and XRD investigation on N^+ ion implantation into Ti-2Al-2.5Zr alloy

作　　者：王治国[1] 祖小涛[1] 封向东[1] 牟云峰[1] 林理彬[1] 李燕伶[2] 黄新泉[2] 

机构地区：[1]四川大学物理系辐射物理及技术教育部重点实验室,成都610064 [2]中国核动力研究设计院核燃料及材料国家重点实验室,成都610041

出　　处：《中国有色金属学报》2001年第z2期207-210,共4页The Chinese Journal of Nonferrous Metals

摘　　要：Ti 2Al 2 .5Zr合金中注入能量为 75keV的N+ 离子 ,注入剂量为 3× 10 17/cm2 和 8× 10 17/cm2 ,注入过程样品的温度低于 2 0 0℃。N+ 离子在Ti 2Al 2 .5Zr合金中的射程借助TRIM 96程序计算为 12 2 2 。注入后的样品用X射线衍射方法 (XRD)以及光电子能谱方法 (XPS)进行分析。XRD衍射谱表明有新相生成 ,经分析为TiN和TiO2 ,但这些新相的峰非常微弱 ,很难区分。XPS宽程扫描谱表明注入后样品表面主要为Ti,C ,N和O。XPS关于Ti2 p和N 1s窄程扫描谱表明N+ 离子注入后在合金表面确实形成了TiN和TiO2 。Ti 2Al 2.5Zr alloys were implanted with 75?keV N + ions at temperature lower than 200?℃ with implanting dosage of 3×10 17 /cm 2 and 8×10 17 /cm 2. The projected range was about 1?222?? calculated by TRIM 96 program. The implanted samples were analyzed using X ray diffractometer (XRD) and X ray photoelectron spectrometer (XPS). The X ray diffraction patterns show that the peaks correspond to new phases, TiN and TiO 2 after N + ion implantation. But the peaks for the phases are small and difficult to distinguish. XPS surveys show there are Ti, C, N and O. High resolution XPS collections of the Ti2p and N1s binding energy show that TiN and TiO 2 are formed after N + ion implantation. [

关 键 词：TI-2AL-2.5ZR合金 N+离子注入 XRD XPS 

分 类 号：TG174[金属学及工艺—金属表面处理]