液晶空间光调制器用于光学测量的研究  

Optical measurement using liquid crystal spatial light modulator

作　　者：张洪鑫[1,2] 张健[1] 吴丽莹[1] 

机构地区：[1]哈尔滨工业大学超精密光电仪器工程研究所,黑龙江哈尔滨150080 [2]哈尔滨理工大学机械动力工程学院,黑龙江哈尔滨150080

出　　处：《红外与激光工程》2008年第S1期39-42,共4页Infrared and Laser Engineering

摘　　要：研究了利用液晶空间光调制器的相位调制特性进行光学测量的方法。测试美国BNS公司反射式256×256纯相位液晶空间光调制器,相位响应呈非线性。利用反插值法对非线性相位响应进行了校正,使非线性度缩小1/8,获得了该器件线性的相位响应曲线。利用液晶空间光调制器产生相息图,能够将PV值为0.78λ,均方根为0.13λ的不规则波面,调制成PV值为0.27λ,均方根为0.02λ的近似平面波。实验结果表明,液晶空间光调制器作为补偿器能够应用于任意光学表面的测量。The method of optical measurement using the phase characteristics of liquid crystal spatial light modulator is discussed. The reflecting phase-only liquid crystal spatial light modulator from American BNS company is measured and the phase response is nonlinear. The phase nonlinearity reduces to 1/8 by inverse interpolation and the linear phase response curve is obtained. The Kinoform from this device is used to modulate the arbitrary wavefront which PV is 0.78 λ and RMS is 0.13 λ to approximate plane wavefr...

关 键 词：光学测量 液晶 空间光调制器 相位调制 相息图 

分 类 号：TN761[电子电信—电路与系统]