短相干光源偏振移相Fizeau干涉仪的实验研究  

Experiment on low-coherence polarization phase-shifting Fizeau interferometer

作　　者：徐晨[1] 陈磊[1] 左芬[1] 

机构地区：[1]南京理工大学电子工程与光电技术学院,江苏南京210094

出　　处：《红外与激光工程》2008年第S1期26-29,共4页Infrared and Laser Engineering

基　　金：江苏省"六大人才高峰"项目(06-E-030)

摘　　要：研究了一种偏振移相Fizeau干涉仪,以中心波长为650nm的多纵模半导体激光器作为光源,利用光源短相干特性和一套偏振延迟装置分出一对偏振方向正交参考光和测试光,采用巴比列-索列尔补偿器作为偏振移相器,采集四幅移相干涉图按照传统移相算法图,测试了一块平行平板的前表面面形。PV值为0.0682λ,RMS值为0.0127λ。该方法的优点是移相精度高,移相时无须推动参考镜,可适用于大口径系统的干涉测试,同时消除了多表面干涉杂散条纹的影响。A polarization phase-shifting Fizeau inteferometer is discussed. A multimode semiconductor laser is used as the light souece,of which coherence is used to effectively separate out the orthogonally polarized test and reference bean compoents for interference. phase shifting interferometry has been applied using Babinet-Soleil Compensator. By using the 4-bucket algorithm, front surface figure of a transparent plate has been tested, Measurement results show that the PV and RMS error are 0.068λ and 0.013λ respe...

关 键 词：光干涉计量 偏振Fizeau干涉仪 巴比涅-索列尔补偿器 短相干光源 

分 类 号：TH744.3[机械工程—光学工程]