高频摆镜摆角的高精度测量  

High precision angle measurement of high-frequency scanning mirror

作　　者：魏新武[1] 孟卫华[1] 刘文武[1] 

机构地区：[1]中国空空导弹研究院,河南洛阳471009

出　　处：《红外与激光工程》2008年第S1期35-38,共4页Infrared and Laser Engineering

摘　　要：对应用于线列扫描成像系统的高频高精度摆镜性能测试系统进行了研究,重点解决了摆镜摆角的高精度测量问题,对影响测试精度的关键因素进行了分析,并提出了相应的工程解决方案。A performance testing system of the high-precision and high-frequency scanning mirror used in scanning infrared imaging systems is introduced in this paper. Focusing on the high precision angle measurement of the scanning mirror, this paper analyzes the key factors degrading measuring accuracy, and puts forward the corresponding practical resolution.

关 键 词：激光自准直测量 PSD 角度测量 试精度 

分 类 号：TP274[自动化与计算机技术—检测技术与自动化装置]