彩色PDP喷砂工艺喷头速率控制公式和均匀性控制研究  

Study of Nozzle Rate Controlled Formula and Uniformity Controlling for Sand Blasting Process in Color PDPs

作　　者：刘忠安[1] 朱志军[2] 贺轶斐[3] 

机构地区：[1]国家平板显示工程技术研究中心南京电子器件研究所,南京210016 [2]中国人民解放军驻七七二厂军事代表室,南京210009 [3]总参陆航部驻上海地区军事代表室,上海200233

出　　处：《光电子技术》2008年第4期250-253,共4页Optoelectronic Technology

摘　　要：研究和引入了彩色PDP的喷砂工艺均匀性控制方法和喷头速率控制公式。均匀性控制研究表明增加喷砂次数,同时减小步进距离,或采用喷头阵列是提高喷砂工艺均匀性的有效措施。喷头速率控制公式给出了单次喷砂和多遍喷砂及喷头阵列和单喷头的喷头移动速率之间的关系。采用多个喷头的阵列适合工业化大生产。而长条形喷头更有利于提高喷砂工艺的均匀性。The nozzle rate controlled formula and uniformity controlling method of sand-blasting process for color PDPs is introduced and studied.The study of the process uniformity controlling shows that increasing the times of sand-blasting and decreasing the interval of nozzle moving or choosing nozzle array is an effective method to advance the process uniformity.The relation between one time nozzle moving rate and n times rate or between nozzle array rate and single nozzle rate for getting uniform barrier ribs is...

关 键 词：障壁 喷砂工艺 喷头阵列 喷头速率控制公式 

分 类 号：TN873[电子电信—信息与通信工程]