TiO_2种子层对(Pb,La,Ca)TiO_3薄膜织构的影响  

Effect of TiO_2 Seeding Layers on the Texture in(Pb,La,Ca)TiO_3 Films

作　　者：迟庆国[1] 李伟力[1] 费维栋[1] 

机构地区：[1]哈尔滨工业大学材料科学与工程学院,黑龙江哈尔滨150001

出　　处：《郑州大学学报（工学版）》2009年第1期144-147,共4页Journal of Zhengzhou University（Engineering Science）

摘　　要：利用脉冲激光法(PLD)制备了镧钙掺杂的钛酸铅(Pb0.8La0.1Ca0.1)Ti0.975O3(PLCT)热释电薄膜,通过广角X射线衍射(XRD)研究了薄膜的相组成,利用X射线镜面反射表征TiO2种子层的厚度,通过X射线衍射及ω扫描研究了TiO2种子层对薄膜晶体学织构及其弥散程度的影响.结果表明,合适的晶化温度可以获得纯钙钛矿相的PLCT热释电薄膜.种子层的引入改变了薄膜的织构类型,无种子层时,薄膜倾向于形成(100)织构;而引入TiO2种子层则有利于薄膜(301)织构的形成.(Pb0.8La0.1Ca0.1)Ti0.975O3(PLCT) pyroelectric film deposited on Pt/Ti/SiO2/Si substrate as prepared by pulsed laser deposition(PLD).The phase composition of the films was analyzed by wide angle X-ray diffraction(XRD).Thickness of TiO2 seeding layers was evaluated by glancing-incidence X-ray analysis(GIXA).An ω-scan X-ray diffraction technique was employed to study the influence of TiO2 seeding layers on crystalline texture and the misorientation of PLCT films.The investigation of structure by X-ray diffract...

关 键 词：TiO2种子层 PLCT薄膜 织构 

分 类 号：O484[理学—固体物理]