微细群孔电解加工试验研究  

Preparation of Multiple Micro-holes by Electrochemical Micromachining

作　　者：王磊[1] 朱荻[1] 曲宁松[1] 王明环[1] 

机构地区：[1]南京航空航天大学机电学院,南京210016

出　　处：《微细加工技术》2007年第2期52-56,64,共6页Microfabrication Technology

基　　金：教育部博士点基金资助项目(20050287020);国家自然科学基金资助项目(503750730);江苏省自然科学基金资助项目(BK2004126);南京航空航天大学科技创新基金资助项目(Y0489-052)

摘　　要：基于微细电解加工理论,采用微细圆柱群电极进行了微细群孔电解加工工艺试验,研究了加工电压、脉冲宽度、电解液浓度、成分等因素对群孔加工精度的影响。结果表明,减小加工电压和脉冲宽度,采用低浓度钝化性电解液可以显著提高群孔电解加工精度。研究结果对实现微细群孔结构高精度和高效率加工具有指导意义。Multiple micro-holes were prepared by electrochemical micromachining with multiple cylindrical micro-electrodes. Effects of conditions such as voltage, pulse duration, composition and concentration of electrolyte on machining accuracy were investigated. The results show that the machining accuracy of multiple micro-holes could be significantly improved when the low voltage and pulse duration are reduced and an inactive electrolyte with a low concentration is used.

关 键 词：微细电解加工 加工间隙 微细群孔 

分 类 号：TG661[金属学及工艺—金属切削加工及机床]