有机半导体薄膜层的图形化方法  

The Methods of Patterning Organic Semiconductor Thin Film

作　　者：甄丽娟[1] 刘明[1] 商立伟[1] 涂德钰[1] 刘兴华[1] 刘舸[1] 

机构地区：[1]中国科学院微电子研究所纳米加工与新器件集成技术实验室,北京100029

出　　处：《微细加工技术》2007年第3期34-38,共5页Microfabrication Technology

基　　金：国家重点基础研究发展计划资助项目(2006CB806204);国家自然科学基金资助项目(6067600160676008)

摘　　要：对有机半导体层的图形化方法进行了详细介绍。对比分析了非传统有机半导体薄层的图形化方法和与传统光刻技术类似的有机层图形化方法,指出了各种方法的适用范围及其优缺点。Patterning of the organic semiconductor thin film is a key technology to drive the development of the organic devices and circuits.Several different ways of patterning the organic semiconductor layers were introduced detailedly.After some nontraditional and traditional methods of patterning organic layers were analyzed,their application fields as well as characteristics were described.

关 键 词：图形化 有机半导体 喷墨打印 微接触印刷 

分 类 号：TN304.055[电子电信—物理电子学]