微细电解加工中工具电极的制备及应用  

Preparation and Application of Electrodes Used for the Tool of Micro-electrochemical Machining

作　　者：王明环[1] 朱荻[2] 王磊[2] 张朝阳[2] 

机构地区：[1]浙江工业大学机电学院,杭州310032 [2]南京航空航天大学机电学院,南京210016

出　　处：《微细加工技术》2007年第5期52-55,60,共5页Microfabrication Technology

基　　金：航空科学基金资助项目(04H52055)

摘　　要：超微细电极的获得和工艺过程控制是电化学加工的关键,给出了超微细电极制备及其在高精度三维金属结构加工中的应用研究结果。采用电化学腐蚀法制备微细电极,通过测量回路中的电阻变化值控制电极直径,加工出直径为3μm^20μm的单个微细电极和直径为40μm的微细群电极。在电极制备基础上,进行微细孔/缝结构小间隙加工和脉冲加工实验,获得了直径为110μm的群孔和20μm宽度的槽。Preparation of micro-electrode and control of the machining process are the key problems in electrochemical micro-machining(EMM).The research results of the fabriacation of micro-electrodes and their application in three-dimension structures with high prcision was introduced.Electrochemical etching was applied to prepare the micro-electrodes and their diameter was controlled by means of measuring the variation of ohmic resistance in circuit.The micro-electrodes with diameters from 3 μm to 20 μm and the micro electrodes array with diameters of 40 μm were prepared by the method.Based on the preparing of micro-electrodes,the micro-holes and micro-gaps were fabricated by using narrow gap and pulse processing in EMM and the micro-holes with diameters of 110 μm and micro-gaps with width of 20 μm were obtained.

关 键 词：微细电解加工 微电极 微孔阵列 微缝 

分 类 号：TG0662[金属学及工艺]