PZT薄膜电滞回线测试的数值补偿研究  

Numerical Compensation of Hysteresis Measurement on PZT Thin Film

作　　者：许晓慧[1] 褚家如[1] 朱龙洋[1] 吴亚雷[1] 

机构地区：[1]中国科学技术大学精密机械与精密仪器系,合肥230027

出　　处：《微细加工技术》2006年第1期27-31,共5页Microfabrication Technology

基　　金：教育部博士点基金资助项目(20030358018);优秀青年教师资助计划项目(2003)

摘　　要：通过Sawyer-Tower测试电路研究了铁电薄膜的电滞回线,发现薄膜漏电阻以及示波器输入电阻和电容的影响可能会使所测量的电滞回线发生形状扭曲或者使测量结果出现较大偏差,通过数值补偿方法重建了电荷平衡方程,并编制了相应的软件补偿程序。通过对溶胶-凝胶制备的PZT铁电薄膜的电滞回线测试表明,运用该数值补偿方法可以有效补偿薄膜漏电阻以及示波器输入电阻和电容对测试结果的影响,满足PZT铁电薄膜制备技术以及微机电系统中器件设计对薄膜性能测试的要求。Sawyer-Tower test circuit was used to measure the hysteresis loop of ferroelectric PZT thin film. The influence of leakage currents in the film and parasitic effect of the oscilloscope may contribute to strongly affect hysteresis measurement, making impossible the correct determination of the remanent and spontaneous polarization (P4 and Ps) and of the coercive field (Ec). Considering the influence of leakage currents and parasitic effect the charge equilibrium equation was reconstructed, and a numerical procedure was then presented allowing to restore the true shape of the ferroelectric polarization. The merit of this method was demonstrated through a successful application to a ferroelectric PZT thin film.

关 键 词：电滞回线 极化 PZT 数值补偿 

分 类 号：TN247[电子电信—物理电子学]