微光机械振动传感器的设计与制作  

Design and Fabrication of Micro-Opto-Mechanical Vibration Sensor

作　　者：伦凤艳[1] 张平[1] 高福斌[2] 贾宏光[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室 [2]吉林大学电子科学与工程学院集成光电子学国家重点实验室,长春130012

出　　处：《微细加工技术》2006年第1期61-64,共4页Microfabrication Technology

基　　金：国家自然科学基金资助项目(60274041)

摘　　要：采用旋涂和干法刻蚀技术,制作了一种新型有机集成微光机械振动传感器,其主要结构是由在硅基上制作的聚甲基丙烯酸甲酯(PMMA)悬臂梁和光波导集成光路组成,探测光路采用强度调制型开环差分探测,利用光-机转换功能,实现对微小振动量的检测。通过对该器件结构参数的优化设计和幅频特性分析表明,所制备的器件具有灵敏度高、线性度好、抗电磁干扰、工艺简单、成本低等优点。A novel organic integrated micro-optomechanical vibration sensor was fabricated by spin coating and dry etch technique. The primary structure was made up of the integrated circuit of optical waveguide, and the cantilever which was made by the polymethyl methacrylate(PMMA) on silicon substrate. Intensity modulation open loop difference detection optical path was applied to detect micro-vibration by optics-mechanics change-over function. Optimum design of structure parameter and theoretical analysis of amplitude-frequency characteristic of the device indicated that the device was in possession of advantages such as higher sensitivity and good linearity, resist electromagnetic interference, process simplicity, low cost, etc.

关 键 词：振动传感器 聚甲基丙烯酸甲脂(PMMA) 悬臂梁 光波导 灵敏度 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]