碳纳米管在APTES自组装膜表面沉积的研究  

Research on Deposition of Carbon Nanotubes on APTES Self-assembled Monolayers

作　　者：彭倚天[1] 胡元中[1] 王慧[1] 

机构地区：[1]清华大学摩擦学国家重点实验室,北京100084

出　　处：《微细加工技术》2006年第3期54-57,共4页Microfabrication Technology

基　　金：国家重点基础研究发展计划(973)资助项目(2003CB716201)

摘　　要：基于碳纳米管(CNTs)能沉积到3-氨丙基三乙氧基硅烷(APTES)自组装膜表面而定位,采用自组装方法,在硅基底上制备了具有氨基表面的APTES自组装膜。将APTES自组装膜浸入碳纳米管分散液(N,N-二甲基甲酰胺,DMF)中,实现了CNTs在APTES自组装膜上的沉积。实验发现,温度、时间以及CNTs在分散液中的浓度等因素对碳纳米管在APTES自组装膜上的沉积有很大影响。结果表明,延长沉积时间、提高沉积温度和CNTs在分散液中的浓度均能增强CNTs在自组装膜上的沉积,为进一步有效控制CNTs定位和构建基于CNTs结构的纳米电子器件提供了帮助。For deposition of carbon nanotubes (CNTs) on a surface of self-assembled monolayers (SAMs), an ultra-smooth (3-aminopropyl)-triethoxysilane (APTES) SAMs with amino-terminal groups was prepared on a silicon substrate before deposition of CNTs because CNTs can be deposited on the surface of the APTES SAMs and positioned easily, CNTs were deposited on the SAMs after it was immerged into the N, N-dimethylformamide (DMF) suspension with CNTs. It is found that temperature, time and concentration of CNTs in the suspension greatly affect deposition of CNTs. The experimental results indicate that deposition of CNTs is enhanced with increasing of temperature and concentration of CNTs in the suspension and lasting of time. The results can be used to effectively position the CNTs on APTES SAMs and fabricate the nano-electronic devices with CNTs.

关 键 词：碳纳米管 自组装单层膜(SAMs) 沉积 3-氨基丙基三乙氧基硅烷(APTES) 

分 类 号：TN23[电子电信—物理电子学]