微拾振器压电悬臂梁结构的设计与测试  

Design and Test of Piezoelectric Cantilever Structure for Microvibration Pickup Sensor

作　　者：方华斌[1] 董璐[1] 刘景全[1] 陈迪[1] 蔡炳初[1] 徐峥谊[1] 王莉[1] 

机构地区：[1]上海交通大学微纳科学技术研究微米/纳米加工技术国家级重点实验室薄膜与微细技术教育部重点实验室,上海200030

出　　处：《微细加工技术》2006年第5期55-58,64,共5页Microfabrication Technology

摘　　要：提出了一种压电悬臂梁结构的微拾振器,利用有限元法计算了结构的固有频率和电压输出,以设计适合具体应用环境的器件结构。采用MEMS技术制备了器件原型并进行了试验测试。研究表明,所制备的器件在加速度为9.8 m/s2的低频谐振激励下电压输出达200 mV以上。考虑到压电薄膜的制备和湿法刻蚀硅造成的不均匀性,可以认为,测试结果和模拟结果基本相符,为设计、制备高性能的器件打下了良好的基础。A piezoelectric-cantilever-type microvibration pickup sensor is presented. To design appropriate structure for concrete vibration conditions, the natural frequency and corresponding voltage signal output are calculated and analyzed by finite element method. MEMS technique is utilized to fabricate device prototypes and they are measured. The results indicate that the voltage outputs of the fabricated prototypes are over 200 mV under a low frequency harmonic excitation of 9.8 m/s acceleration. Due to the influence of the variance resulted from PZT film preparation and silicon wet etching, the testing results may be considered to be accordant with the simulation results, which lay valuable foundation for design and fabrication on high performance microvibration pickup sensors.

关 键 词：微拾振器 压电悬臂梁 有限元模拟 固有频率 电压输出 

分 类 号：TN384[电子电信—物理电子学]