基于PZT厚膜驱动的微喷芯片的设计  

Design of Dual PZT Actuators Based Micro Dispensing Chip

作　　者：乔治[1] 许宝建[1] 周洪波[1] 金庆辉[1] 赵建龙[1] 

机构地区：[1]中国科学院上海微系统与信息技术研究所

出　　处：《微细加工技术》2006年第6期28-31,共4页Microfabrication Technology

基　　金："973计划"资助项目(2005CB724305);中国科学院重要方向项目资助(KGCX2-SW-10)

摘　　要：设计了一种基于双压电薄膜驱动的微喷芯片,该芯片中每个流体单元结构主要是由进样室、微管道、喷口以及集成了PZT驱动器的主副贮液室组成,其中主驱动器提供喷射液体的驱动力,副驱动器抑制液体回流;采用计算流体力学模拟(CFD-simulation)对其进行了结构设计、进样模拟和喷样模拟,结果表明,液体能成功进样及喷样。同时当微管道尺寸小于40μm时,喷样过程中微管道内将不再产生回流,证明双PZT驱动器的芯片设计合理,为该芯片的制作打下基础。A novel micro dispensing chip with dual PZT actuators was designed. Each dispensing unit of the chip contains inlet, micro-channel, nozzle and the main and subsidiary reservoirs with integrated PZT actuators. The main actuator can provide energy for liquid ejection and the subsidiary one restrains reflowing of the liquid. By means of GFD-simulation, the structure of dispensing chip was designed, and filling and dispensing of the liquid filling were simulated. The results show that the liquid can be filled and dispensed successfully. When the length of the micro-channel is smaller than 40 μm, there is no refluence in micro-channel during dispensing, indicating that the design of dispensing chip with dual PZT actuators is reasonable and lays a foundation for subsequent fabrication of the microchip.

关 键 词：微喷芯片 PZT驱动器 回流 CFD模拟 

分 类 号：TN304.055[电子电信—物理电子学]