离子交换玻璃光波导工艺与集成光学器件研究  

Fabrication techniques of ion-exchanged-glass- based waveguides and related integrated optics components

作　　者：王明华[1] 郝寅雷[1] 李锡华[1] 周强[1] 江晓清[1] 杨建义[1] 

机构地区：[1]浙江大学信息与电子工程学系,浙江杭州310027

出　　处：《红外与激光工程》2006年第z5期95-98,共4页Infrared and Laser Engineering

基　　金：浙江省科技厅重点项目资助(G2004177)(光功分模块技术研究);浙江省自然科学基金项目资助(610130)

摘　　要：针对目前国内集成光学技术的现状,对离子交换玻璃基集成光学技术进行了研究,目标是在建立起一个离子交换玻璃基集成光学制作平台,并在此基础上研制出低成本的光通信用光功分器。通过对玻璃基离子交换工艺进行的研究,包括电场辅助离子交换、电场辅助退火、K^+离子掩膜工艺等,成功制备了具有低传输损耗和优良偏振相关损耗的掩埋式光波导;通过对基于 Y 分支器的光功分器结构的优化,成功研制了1×4、1×8、1×16、1×32的功分器,器件的主要性能指标已经"达到同类产品的国际水平"。此外,还进行了新型光学器件制作方面的研究。In this paper,the technology of the ion-exchanged-glass-based integrated optics is studied with the purpose to establishing a platform to fabricate integrated optics components.After the ion-exchange techniques are investigated deeply,including the electric-field-assisted ion-exchange technique,the electric-field-assisted annealing, masking technique with the ion K^+,the buried waveguide with low propagation loss and low polarization-dependent loss is achieved successfully.With the optimization of the structure and configuration of Y-branch-based optical splitters,1×4,1×8,1×16,and 1×32 optical splitters are fabricated successfully.The main performance of these optical splitters reaches that of the products available in the international markets.Meanwhile,some new optical components are also studied.

关 键 词：离子交换 玻璃 光波导 集成光学 光功分器 

分 类 号：TN256[电子电信—物理电子学]