PSD在激光位移检测系统中的应用研究  

Applications research to PSD in the laser displacement detecting system

作　　者：段洁[1] 孙向阳[1] 蔡敬海[1] 周娜[1] 肖作江[1] 

机构地区：[1]长春理工大学,吉林长春130022

出　　处：《红外与激光工程》2007年第z1期549-552,共4页Infrared and Laser Engineering

摘　　要：PSD(Position Sensitive Detector)是一种新型位置敏感探测器件,具有响应时间短、位置分辨率高、光谱响应范围大等优点。首先介绍了PSD器件的工作机理,阐述了基于光三角原理的激光位移检测系统的工作原理,给出PSD应用于激光位移检测系统的总体结构框图,并且针对PSD的电流信号与被测位移量之间的非线性关系,提出了有效的非线性修正电路。最后通过对影响系统测量精度的因素进行详细分析,从中看出PSD可应用于高精度的激光位移检测系统中,并且具有高速度、高精度、非接触和在线检测等优点。The PSD(Position Sensitive Detector),which has several excellent performances---short response time,high position resolution and large response range of spectrum,is a new type of sensitive detecting devices of position.Before represented the operating principle of the laser displacement detecting system which is based on the optical triangle principle,the operating principle of the PSD is introduced.The gross structure diagram of the PSD application in the laser displacement detecting system was discussed.Then,an effective non-linear amendment circuit based on non-linear relation between current signal of PSD and measured displacement is presented.In the end,through the detail analysis of the factor which is influencing the system measurement accuracy,it is seen that the PSD can apply in the high-accuracy laser displacement detecting system and hold the merits of high-speed,high-accuracy,no-contact and on-line detection,etc.

关 键 词：光学三角原理 PSD 非接触测量 

分 类 号：TN364[电子电信—物理电子学]