不锈钢箔的脉冲光纤激光器精密微孔加工研究  

Pulsed fiber laser microdrillng of stainless steel foils

作　　者：翟立斌[1] 蒋茂华[1] 赵莹[1] 赵宏亮[1] 陈继民[1] 律永顺[2] 

机构地区：[1]北京工业大学激光工程研究院,北京100022 [2]IPG中国公司海目激光公司,北京100076

出　　处：《红外与激光工程》2007年第z1期588-591,共4页Infrared and Laser Engineering

基　　金：国家自然科学基金项目(50575005)

摘　　要：光纤激光器是近年来发展迅猛的一种激光源,它具有光束质量好、体积小、免维护等许多优点。采用峰值功率为10 kW,最大平均功率为0.8 W的脉冲光纤激光器对50μm的不锈钢箔进行微孔精密加工,得到了典型孔径为10μm的微孔,最小孔径可以达到3μm;同时得到了激光功率、激光脉冲重复频率、钻孔持续时间等因素与孔径大小的关系曲线,并对孔径大小以及影响孔径质量的这些因素进行了分析。实验表明用脉冲光纤激光器对不锈钢材料进行微孔加工是一种非常有效的方法。Fiber laser as a novel laser source has been developed rapidly in recent years.It has an excellent beam quality(M2=1.1),small footprint,almost maintenance free.In this paper laser microdrilling on stainless steel foils(50 μm) with the aid of a 0.8 W pulsed fiber laser(λ=1.07 μm,ppeak=10 kW) was reported.After microprocessing,the micropores were valued and measured with a 3D microscope and OLYMPUS PMG3 microscope.The minimum pore size is 3.1 μm while its typical size is 10 μm.The influence of the average power,pulse repetition rate and drilling time on the pore size is also analysed.

关 键 词：激光微加工 微孔 不锈钢 脉冲光纤激光器 

分 类 号：TN249[电子电信—物理电子学]