基于multi-agent的半导体生产线动态调度方法  

Multi-agent-based dynamic scheduling method for semiconductor wafer fabrication facilities

作　　者：黄轶愚[1] 李莉[1] 乔非[1] 许维胜[1] 

机构地区：[1]同济大学电子与信息工程学院,上海200092

出　　处：《清华大学学报（自然科学版）》2007年第z2期1895-1898,共4页Journal of Tsinghua University(Science and Technology)

基　　金：国家自然科学基金资助项目(70531020;60374005);国家"九七三"重大基础研究基金项目(2002CB312002);同济大学青年优秀人才培养行动计划

摘　　要：提出了一种基于multi-agent的半导体生产线动态调度方法。首先建立了MAS仿真模型,包括管理、投料、工件和设备4种agent;然后设计了工件agent与设备agent的动态调度协商机制,以工件最小加权延迟为决策指标,分别考虑设计了单片/卡加工设备与批加工设备agent的报价算法。此外,还考虑了二次协商机制用于解决设备突然故障对生产线的影响。基于实际半导体生产线模型对所提出方法进行了仿真验证,并与一些常用的调度规则进行了比较,仿真结果表明,在平均加权延迟和准时交货率等指标上,该文提出的方法均有较大的提高。A multi-agent-based dynamic scheduling method was developed for semiconductor wafer fabrication facilities with consideration of their scheduling characteristics.First,the MAS model was developed including the management agent,release agent,lot agents and machine agents(representing the scheduling of related events in the facilities,the release plan,and various machines).Then the negotiation mechanism between the lot agents and the machine agents was designed to provide dynamic scheduling with the objective function minimizing the average weighted delivery delays.The decision methods for the machine agents representing the wafers in the lot processing machines and the machine agents representing the batch processing machines are considered separately.A second time negotiation mechanism is used to alleviate the effects of machine failures on the facilities.Finally,a wafer fabrication facility-based simulation model was used to validate the method.The simulations show that the method is faster than common scheduling rules(such as FIFO and EDD) with better average weighted delivery delays and on-time delivery rates.

关 键 词：调度 MULTI-AGENT 协商 半导体生产线 

分 类 号：TN305[电子电信—物理电子学]