变包含角平面光栅单色器光斑横移分析  

Analysis of light spot transversal transfer for the variable included angle plane grating monochormator at SSRF

作　　者：吴坤[1,2] 薛松[1] 卢启鹏[3] 彭忠琦[3] 陈家华[1] 邰仁忠[1] 

机构地区：[1]中国科学院上海应用物理研究所,上海201800 [2]中国科学院研究生院,北京100049 [3]中国科学院长春光学精密机械与物理研究所,长春130000

出　　处：《核技术》2010年第5期321-325,共5页Nuclear Techniques

摘　　要：介绍了变包含角平面光栅单色器的光路布局及结构组成,分析了影响单色器光斑横移的因素,对受力变形引起光斑横移的因素,运用有限元软件Ansys进行了数值模拟;根据模拟结果(0.33″)对单色器的相关部件加工精度进行误差分配;按照分配误差要求完成单色器结构设计、加工、组装,对单色器出射光斑横向角漂移重复精度进行了测试,结果为0.7″。In this paper,optical layout and structure of the variable included angle plane grating monochormator(VAPGM) at Shanghai Synchrotron Radiation Facility(SSRF) is introduced,and the factors that result in light spot transversal transfer are analyzed.Numerical simulation for the deformation under loads is done by using the Ansys code,and the dispensatory errors for relevant parts of the monochromator are decided based on the simulation results.The monochromator structure has been designed according to the disp...

关 键 词：变包含角平面光栅单色器 光斑漂移 ANSYS 数值模拟 

分 类 号：TH744.1[机械工程—光学工程]