Automatic abstraction of interference fringes with image technique  

作　　者：浦昭邦 陶卫 张敏 

出　　处：《Journal of Harbin Institute of Technology(New Series)》2002年第2期166-169,共4页哈尔滨工业大学学报（英文版）

基　　金：SponsoredbytheNationalDoctor’sFinanceofChina(GrantNo .970 2 13 2 8)

摘　　要：ion technique of interference fringes used in phase modulation and phase scanning modulation interferometer is presented. For the measurement of amplitudes of interference fringes, fringes are fitted and their central points are determined automatically according to their distribution rules. However, for the measurement of their phases, fringes should be recognized and processed with different calculating algorithms and least square optimization methods depending on the scanning modulation mode. When this technique is used for measurement of surface roughness, the measurement uncertainty is better than 5nm and the repeatability is less than 5%.ion technique of interference fringes used in phase modulation and phase scanning modulation interferometer is presented. For the measurement of amplitudes of interference fringes, fringes are fitted and their central points are determined automatically according to their distribution rules. However, for the measurement of their phases, fringes should be recognized and processed with different calculating algorithms and least square optimization methods depending on the scanning modulation mode. When this technique is used for measurement of surface roughness, the measurement uncertainty is better than 5nm and the repeatability is less than 5%.

关 键 词：INTERFERENCE FRINGES ABSTRACTION PHASE-MODULATION IMAGE detection 

分 类 号：TH71.74[机械工程—测试计量技术及仪器]