基于三片曲面反射镜的离轴投影成像系统  

Off-axis Projection System Based on Three Reflectors with Zernike Polynomial Surfaces and Even Aspheric Surfaces

作　　者：孙文军[1,2,3] 赵立萍[4] 孙京南 李娟[1,2,3] 李孟洋[1,2,3] 支洪武[1,2,3] 

机构地区：[1]哈尔滨师范大学光电带隙材料教育部重点实验室 [2]黑龙江省先进功能材料与激发态重点实验室 [3]物理与电子工程学院,哈尔滨150025 [4]牡丹江师范学院物理系,黑龙江牡丹江157012

出　　处：《光子学报》2012年第6期654-657,共4页Acta Photonica Sinica

基　　金：黑龙江省青年基金(No.QC06C043);黑龙江省教育厅骨干教师项目(No.1251G031);哈师大预研项目(N0.08XYS-01);黑龙江省研究生创新科研资金项目(No.YJSCX2011-414HLJ)资助

摘　　要：采用调制传递函数和波前像差分析方法,设计了基于偶次非球面反射镜和Zernike自由曲面反射镜构成的放大倍数为80,相对孔径为2.8的三个离轴投影成像系统.其中第一片反射镜M1表面为凹面用于减小第二片反射镜的尺寸及获得高的对比度,而第二片反射镜M2和第三片反射镜M3表面为凸面用于校正系统像差及获得更短的投影距离.经软件设计与分析,三系统中基于三片Zernike自由曲面反射镜的成像系统光学性能最好,调制传递函数实现60lp/mm时60%以上,畸变小于2.0%.与其它文献相比,基于三片Zernike自由曲面反射镜系统可以更好地消除像差,缩短系统厚度,增大系统的可视角与相对孔径.Three off-axis projection systems based on even aspheric surface reflectors and Zernike polynomial surface reflectors are designed using wave front aberrations analysis and modulation transfer function.The projection system consists of three reflectors,in which the number of Zernike polynomial surface reflectors is different.The first mirror M1 is concave to reduce the size of the second mirror and obtain high contrast ratio.The second mirror M2 and the third mirror M3 are convex to achieve a shorter projection distance and little system aberration.Optical performance analysis show that the system based on three Zernike polynomial surface reflector is the best,the MTF is more than 60% at 60 lp/mm and system distortion is less than 2.0% under the condition of F-number=2.8,the magnification of 80.Compared results with references show that the designed system based on three Zernike polynomial surface reflectors can more easily eliminate system aberrations,shorten system thickness and increase the visual angle and relative aperture.

关 键 词：离轴投影成像系统 泽尼克多项式曲面 调制传递函数 畸变 

分 类 号：O436[机械工程—光学工程]