sol-gel法制备WO_3薄膜的成膜性研究  

Formation properties of WO_3 thin film prepared by sol-gel

作　　者：吉晓瑞[1] 张冬[1] 付义成[1] 秦国驹[1] 

机构地区：[1]沈阳工程学院基础教学部,沈阳110136

出　　处：《沈阳工程学院学报（自然科学版）》2012年第3期275-277,共3页Journal of Shenyang Institute of Engineering:Natural Science

摘　　要：用sol-gel法在ITO导电玻璃上制备了WO3电致变色薄膜,用光学显微镜对所有薄膜进行拍照,对比薄膜的成膜情况.经观察发现,薄膜前驱液浓度、拉膜速度和杂质对成膜性均有显著影响.从拉膜的过程方面讨论了出现上述情况的原因.WO3 electrochromic thin film is prepared on ITO glass substrate by sol-gel method.By using optical microscope,we get all the optical pictures of films prepared.These pictures show that the concentration of precursor solution,the speed of dip coating and the impurity in solution affect the quality of film.In this paper,we will discuss the reasons of the situation above from the process of dip coating.

关 键 词：SOL-GEL法 WO3薄膜 成膜性 

分 类 号：TB383[一般工业技术—材料科学与工程]