液体静压支承平台的直驱低速性能影响因素分析  

Effect analysis on the low speed stability of hydrostatic bearing stag driven by linear motor

作　　者：陈东生[1] 吉方[1] 蓝河 

机构地区：[1]中国工程物理研究院机械制造工艺研究所,四川绵阳621900

出　　处：《制造技术与机床》2014年第5期68-71,共4页Manufacturing Technology & Machine Tool

基　　金：国家"高档数控机床与机床制造装备"科技重大专项:强激光光学元件超精密制造关键装备研制(2013ZX04006011)

摘　　要：针对液静压导轨支承平台的直线电动机低速驱动性能,从动力学模型出发,根据驱动系统构架,分析并验证了以下因素对直驱低速性能的影响:检测元件信号类型、信号处理、分辨率;电动机功率变换器类型;控制模式及伺服参数;切削力、导轨油膜的粘性剪切阻力、平台风琴罩及线缆摩擦力等外界干扰力。Aiming at the low- speed dirve capability of hydrostatic bearing stag driven by linear motor,basing on the frame of driving system and model of kinetics,analyzes and validates the influence factor on the low speed stability of direct- driving stag. as follows: the signal type,signal processing and resolution of measure element; the type of power convertor; the model of control and servo parameter; cutting force and viscosity resistance of oil film,interference force of organ cover,the friction of chain and cable,etc.

关 键 词：液体静压支承 直接驱动 低速性能 

分 类 号：TM359.4[电气工程—电机]