嵌入式薄膜微传感器的ANSYS分析与应用  

Analysis and application of ANSYS applied on embedded thin film sensor

作　　者：成云平[1] 武文革[1] 杜晓军[1] 李琦[1] 李学瑞[1] 

机构地区：[1]中北大学机械与动力工程学院,山西太原030051

出　　处：《制造技术与机床》2014年第6期134-138,共5页Manufacturing Technology & Machine Tool

基　　金：山西省回国留学人员科研资助项目(2013-086)

摘　　要：设计了一种嵌入式薄膜微传感器,由多层薄膜材料构成,在应变与压阻原理和材料力学理论的基础上,采用简化的等效悬臂梁结构建立了数学分析模型,将有限元分析方法应用于传感器的结构分析中,并应用ANSYS12.0对薄膜微传感器结构的线性度以及应变与应力进行了模拟,同时分析了传感器结构的几何参数对输出电压的影响,从理论和有限元分析方面验证了薄膜微传感器的可行性,为薄膜微传感器的进一步制作和应用奠定了基础。This paper designs an embedded thin film sensor,which is composed of dielectric films. Based on piezoresistive theory,strain and mechanics of materials,a mathematic analysis model is formed by using equivalent cantilever beam structure and finite element method to a structure of sensor analysis. The linearity capability,the strain and stress of constantan thin film are simulated,and the effects of geometric parameters to the output voltage are analyzed by using the finite element software of ANSYS12. 0. The feasibility of the thin film sensor is verified from theory and finite element,and it can be the base of production and application of sensor.

关 键 词：压阻分析 薄膜微传感器 切削力 有限元法 

分 类 号：TH7[机械工程—仪器科学与技术] TP212[机械工程—精密仪器及机械]