CdSe_xTe_(1-x)薄膜的制备及其XPS表征  

Synthesis and XPS Study of CdSe_xTe_(1-x) Films

作　　者：刘永生[1,2] 李蓉萍[1,2] 邹凯 

机构地区：[1]内蒙古大学物理科学与技术学院,内蒙古呼和浩特010021 [2]内蒙古自治区高等学校半导体光伏技术重点实验室,内蒙古呼和浩特010021

出　　处：《材料科学与工程学报》2014年第1期47-51,共5页Journal of Materials Science and Engineering

基　　金：内蒙古教育厅资助项目(NJ09006)

摘　　要：本文采用真空蒸发法在CdTe粉末中按不同比例掺入CdSe粉末,选择合适的工艺条件,在玻璃衬底上制备了性能稳定的CdSex Te1-x三元化合物薄膜。利用XRD、紫外-可见分光光度计、XPS对薄膜的结构、光学性能、组成成分等进行了表征。XRD测试结果表明,薄膜均为立方闪锌矿结构的CdSex Te1-x三元化合物,并沿(111)晶面择优生长,晶格常数随x值增大而减小;透射光谱表明薄膜的吸收限随x值增大先向长波方向移动,x=0.64时达到最大值,然后向短波方向移动;XPS分析表明,薄膜的主要成分为CdSex Te1-x三元化合物,随着x值增大,Se、Te、Cd三种元素的特征峰均向高结合能方向偏移。CdSexTe1-x ternary thin films with different chemical composition were prepared on glass substrates by vacuum evaporation of CdTe and CdSe powders.Crystal structural,optical properties,chemical composition of the CdSexTe1-x thin films were characterized by X-ray diffraction(XRD)technique,UV-visible spectrophotometer and X-ray photoelectron spectroscopy(XPS).XRD analysis revealed that the CdSexTe1-x thin films belong to zinc blende structure and show(111)preferred orientation.The lattice constant of the thin films decreases steadily with increasing x.Optical transmission spectrum shows that absorption edges of CdSexTe1-x films are shifted to longer wave first and then shifted to shorter wave with the increase of Se concentration,passing through the maximum at x=0.64and.XPS results indicated that the major component of the films is the CdSexTe1-x compound.Characteristic peaks of Se,Te and Cd are all moved to higher energy side with the increase of x.

关 键 词：真空蒸发 CdSexTe1-x薄膜 XRD XPS表征 

分 类 号：O484.1[理学—固体物理]