AFM based anodic oxidation and its application to oxidative cutting and welding of CNT  

作　　者：JIAO NianDong WANG YueChao XI Ning DONG ZaiLi 

机构地区：[1]State Key Laboratory of Robotics,Shenyang Institute of Automation,Chinese Academy of Sciences,Shenyang 110016,China [2]Department of Electrical and Computer Engineering,Michigan State University,East Lansing 48824,USA

出　　处：《Science China(Technological Sciences)》2009年第11期3149-3157,共9页中国科学（技术科学英文版）

基　　金：Supported by the National Natural Science Foundation of China (Grant No. 60635040);Nation High technology Research and Development Program of China ("863" Program) (Grant No. 2009AA03Z316)

摘　　要：Probe anodic oxidation by atomic force microscope (AFM) is one of the most important techniques in fabricating nano structures and devices. The technique was further studied in this paper. By analyzing the distribution of the electric field on substrate surface the dependence of oxide characters on field was discussed. The impacts of various parameters on oxide fabrication were experimentally studied. Based on these studies, we realized the oxidative cutting and welding of carbon nanotube (CNT) by the AFM based oxidation technique and provided a novel technique for the assembly and fabrication of CNT based nano devices.Probe anodic oxidation by atomic force microscope (AFM) is one of the most important techniques in fabricating nano structures and devices. The technique was further studied in this paper. By analyzing the distribution of the electric field on substrate surface the dependence of oxide characters on field was discussed. The impacts of various parameters on oxide fabrication were experimentally studied. Based on these studies, we realized the oxidative cutting and welding of carbon nanotube (CNT) by the AFM based oxidation technique and provided a novel technique for the assembly and fabrication of CNT based nano devices.

关 键 词：anodic oxidation atomic force MICROSCOPE nanofabrication CUTTING and WELDING carbon NANOTUBE 

分 类 号：TB302[一般工业技术—材料科学与工程]