Extraordinary self-lubrication properties of non-hydrogenated diamond-like carbon films under humid atmosphere  

作　　者：WANG Feng WU WeiDong LI Jun LI ShengYin TANG YongJian SUN WeiGuo 

机构地区：[1]Institute of Atomic and Molecular Physics of Sichuan University,Chengdu 610065,China [2]Centre of Laser Fusion Research of CAEP,Mianyang 621900,China

出　　处：《Science China(Technological Sciences)》2009年第4期850-856,共7页中国科学（技术科学英文版）

摘　　要：Tribological properties of non-hydrogenated diamond-like carbon (DLC) films were investigated under humid (RH=80%) and dry (RH=5%) air. These films were deposited by pulsed laser deposition (PLD) at different substrate temperatures. Tribological properties of DLC fabricated by PLD is not sensitive to the relative humidity of testing environment. Because of the unique growth mechanism of DLC pre- pared by PLD, DLC is of "soft-hard" double layers, having a very low friction coefficient and wear rate under humid atmosphere. The minimum coefficient and wear rate of film under humid circumstance are 0.045 and 5.94×10?10 mm3N-1m-1, respectively, just a little bit more than those under dry condition. The root means square roughness of film is less than 1 nm. The sp3 content of film grown at room tem- perature (RT) is 72%, and the sp3 content decreases with temperature. Raman spectrum shows that the micro-structure is amorphous network. The largest hardness and elastic modulus of film are 51 GPa and 350 GPa, respectively and they reduce with increase of deposition temperature too. Water contact angles on surface are more than 90° which indicates that films fabricated by PLD are hydrophobic with low surface energy.Tribological properties of non-hydrogenated diamond-like carbon (DLC) films were investigated under humid (RH=80%) and dry (RH=5%) air. These films were deposited by pulsed laser deposition (PLD) at different substrate temperatures. Tribological properties of DLC fabricated by PLD is not sensitive to the relative humidity of testing environment. Because of the unique growth mechanism of DLC prepared by PLD, DLC is of “soft-hard” double layers, having a very low friction coefficient and wear rate under humid atmosphere. The minimum coefficient and wear rate of film under humid circumstance are 0.045 and 5.94×10?10 mm3N?1m?1, respectively, just a little bit more than those under dry condition. The root means square roughness of film is less than 1 nm. The sp3 content of film grown at room temperature (RT) is 72%, and the sp3 content decreases with temperature. Raman spectrum shows that the micro-structure is amorphous network. The largest hardness and elastic modulus of film are 51 GPa and 350 GPa, respectively and they reduce with increase of deposition temperature too. Water contact angles on surface are more than 90° which indicates that films fabricated by PLD are hydrophobic with low surface energy.

关 键 词：pulsed laser deposition (PLD) non-hydrogenated DIAMOND-LIKE carbon (DLC) relative humidity double layer friction coefficient wear rate 

分 类 号：TB383.2[一般工业技术—材料科学与工程]